Decorative Aspects of ZrNx Thin Films Prepared by Reactive Magnetron Sputtering

Abstract

Zirconium nitride films were deposited by direct current (d.c.) reactive magnetron sputtering at the substrates temperature of 200 _C in an N2 and Ar ambient. In terms of composition and optical properties that defines the decorative aspects of the thin films it can be observed three different zones. The first one riched in Zr (max. 5 sccm for N2 flow), the second zone rich in Zr and N2 (for N2 flow between 5 and 15 sccm), and the last one rich in N2 (for N2 flow between 15 and 45 sccm). According to the results, the films that belong to the first region exhibited metallic colors, the second region exhibited several brown colors, and the third region with more nitrogen shows a dark blue color.